Multi-scale modeling of deposition and re-sputtering of NixTi1-x thin film in a magnetron sputtering chamber
Multi-scale modeling of deposition and re-sputtering of NixTi1-x thin film in a magnetron sputtering chamber Aniruddha Dey1, Shampa Aich2, Sudipto Ghosh3, S.S. Mohapatra4, A. Kumar5, Ajit Behera6 1Tata steel, Jamshedpur-831001, India. 2Department of Metallurgical and Materials Engineering, Indian Institute of Technology, Kharagpur-721302, India.. 3Department of Chemical Engineering, National Institute of Technology, Rourkela-769008, India. 4Department of Chemical Engineering, Indian institute of … Read more