On changing the properties of a multilayer structure by preliminary processing of a substrate

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On changing the properties of a multilayer structure by preliminary processing of a substrate

Evgeny L. Pankratov

Nizhny Novgorod State University, 23 Gagarin Avenue, Nizhny Novgorod, 603950, Russia.

Privolzhsky Research Medical University, 10/1 Minin and Pozharsky square, Nizhny Novgorod, 603950, Russia.

DOI:

https://doi.org/10.7494/cmms.2022.2.0790

Abstract:

In this paper, the effect of the preliminary processing of a substrate on the properties of a grown heterostructure is investigated. It is shown that the growth of an epitaxial layer on a buffer layer after preliminary annealing (before the growth) makes it possible to decrease the value of mismatch-induced stress. An analytical approach has been introduced for the analysis of mass and heat transfer in a multilayer structure accounting for mismatch-induced stress.

Cite as:

Pankratov, L. E. (2022). On changing the properties of a multilayer structure by preliminary processing of a substrate. Computer Methods in Materials Science, 22(2), 89–100. https://doi.org/10.7494/cmms.2022.2.0790

Article (PDF):

Key words:

Gas phase epitaxy, Improvement of properties of films, Analytical approach for modeling

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