On prognosis of variation of properties of epitaxial layers by choosing of temperature field during growth

On prognosis of variation of properties of epitaxial layers by choosing of temperature field during growth Evgeny L. Pankratov1, 2 1Nizhny Novgorod State University, 23 Gagarin avenue, Nizhny Novgorod, 603950, Russia 2Nizhny Novgorod State Technical University, 24 Minin Street, Nizhny Novgorod, 603950, Russia Abstract: In this paper, we analyze the influence of the temperature of … Read more